ALS Ring Current
ALS ring current
===== January 2012 =====
01-31 ALS Shutdown
      AIT Maintenance Period

===== February 2012 =====
01-13 ALS Shutdown
      AIT Maintenance Period
14 Rouching Pump replacement. Added cold-cathode gauge.
15 First beam
15-17 AIT Realignment / Testing
22 SMTB1 SEMATECH (Kwon)
23 SMTB1 SEMATECH (Kwon)
24 SMTB1 SEMATECH (Kwon)
29 LAMP Mask1 DRT120139, CNSE (Lyons)

===== March 2012 =====
01 LAMP Mask1 DRT120139, CNSE (Lyons)
   Eternal1 J2M43000NA, IBM (Gallagher)
02 Eternal1 J2M43000NA, IBM (Gallagher)
06 Eternal1 J2M43000NA, IBM (Gallagher)
07 Blank Mask KLA (Liu)
08 BIGTIGER J7M23002NA, IBM (Gallagher)
09 BIGTIGER J7M23002NA, IBM (Gallagher)
12-25 (ALS 2-bunch mode)
28 AIT Maintenance. Computer communications problem.
29 TSMC_OB_RD0644_360A (EE43934.1) TSMC (Huang)
30 TSMC_OB_RD0644_360A (EE43934.1) TSMC (Huang)

===== April 2012 =====
03 Defect40A Intel (Magana)
04 Intel Yan
05 (GF)
06 (GF)
11 
12 CNSE / Intel (Yan)
13 CNSE / Intel (Yan)
17 IBM (Gallagher / Lawless)
18 IBM (Gallagher / Lawless)
19 PSM Mask #1, GF (Wallow, Wood)
20 PSM Mask #1, GF (Wallow, Wood)
26 PSM Mask #3, GF (Wallow, Wood)
27 PSM Mask #3, GF (Wallow, Wood)

===== May 2012 =====
01 SY2034 Samsung (Kim)
02 SY2034 Samsung (Kim)
03 IMO215236 Intel (Liang)
   WaferMask Intel (Park)
04 IMO215236 Intel (Liang)
09 TSMC_OB_RD0644_360A TSMC (Huang)
10 TSMC_OB_RD0644_360A TSMC (Huang)
11 TSMC_OB_RD0644_360A TSMC (Huang)
15 J2N04001NE IBM (Badger)
16 J2N04001NE IBM (Badger)
17 DRT1204014 SEMATECH 
18 CLN1105018 SEMATECH (John)
   IMO113715 
   CLN1106018 SEMATECH (John)  
23 IMO214041 Intel (Yan) {CNSE}
24 PSM #1, GF (Wallow) {CNSE}
25 PSM #1, GF (Wallow) {CNSE}
31 EUV_TDC_PHASE_EVAL_2 Intel (Yan)

===== June 2012 =====
01 RD0510-360A TSMC (Huang)
06 RD0510-360A TSMC (Huang) {CNSE}
07 EUV_TDC_PHASE_EVAL_2 Intel (Yan) {CNSE}
08 Damage_S1 KLA (Liu)
13 SE489 Samsung (Kim)
14 SE489 Samsung (Kim)
15 SE489 Samsung (Kim)
27 J2N05001NA/ETERNAL100 IBM (Gallagher)
28 RD 0510-360-A TSMC (Huang)
29 Intel W5045 (Park)

===== July 2012 =====
06 Intel Wafer_E2G (Park)
11 PSM #3 GF Wallow
12 PSM #3 GF Wallow
(13 SEMATECH) (CNSE Lyons)
18 J2N05001NA/ETERNAL100 IBM (Gallagher)
19 J2N05001NA/ETERNAL100 IBM (Gallagher)
20 HOY1206002 SEMATECH (John)
24 RD0510-360A TSMC (Huang)
25 RD0510-360A TSMC (Huang)
26 TDC_PHASE_EVAL2 Intel (Murachi)
27 TDC_PHASE_EVAL2 Intel (Murachi)

===== August 2012 =====
01 J2M43000NA Eternal1 IBM (Gallagher)
02 IMO214041 Intel (Murachi)
03 IMO214041 Intel (Murachi)
06 MSG1207002 SEMATECH
07 MSG1207002 SEMATECH
08 PSM3, GF Wallow
09 OB RD644 360A TSMC (Huang)
31 DRT1203098 SEMATECH
   DRT1203098 SEMATECH 

===== September 2012 =====
05 DRT1205030 SEMATECH (Jindal)
06 LRM TSMC (Huang)
   DRT1205030 -and- DRT1208057 SEMATECH (Jindal)
07 DRT1203058 -and- DRT1203016 (Naulleau)
12 DRT1203059 Intel (Liang)
13 DRT1203059 -and- DRT1203060 Intel (Liang)
14 DRT1203017 -and- DRT1203018 Intel (Liang)
18 DRT1205085 SEMATECH (Ranganath)
19 DRT1205085 SEMATECH (Ranganath)
20 TDC_PHASE_EVAL2 Intel (Murachi)
21 EJ2 Wafer Mask Intel (Park)

The AIT has been shut down for the last time.
SHARP is on the way!
Last modified: September 27 2012 11:18:03.
 

The AIT was shut down for the last time on Friday, September 21, 2012, in preparation for the new SHARP microscope.

Read a retrospective on the AIT and the development of SHARP.